Introduction

RIOC™ Advantages

1. Simple Integration: The simplicity of the touchscreen user interface and industry-compatible I/O modules allows easy integration of the RIOC with existing systems and requires no external software development costs. Current technical staff can install the RIOC, or let Atomic Medium provide integration services through our worldwide partner network.
   
   The simple I/O setup screens allow the system operator to add, remove, or edit I/O controllers, modules and points with ease. The system operator can assign names and descriptions to all points. Points can be given limits, scaling and offset values, and links to other points for alarm and logging control.


2. Flexible Configuration: The RIOC features the ability to link analog and digital I/O points to focus monitoring to specific process states. The RIOC can be operator-configured to check only a point´s value and limits when a linked digital signal is present. A point´s value can be monitored to make sure the value remains at zero when the linked digital signal is not present. Warnings and alarms associated with the proper operation of the value can be configured to alert the system operator, and/or SECS Host. High-impedance digital I/O modules allow for piggybacking existing flow valve signals into the RIOC digital-signal points. Two analog points can be paired together and the differential between them monitored.


3. Data Capture and Error Reporting: Error and event messages are configurable to notify both the system operator and the SECS/GEM Host. Alarm feedback signals can be sent to the legacy control system. Set point analog output signals are available for closed loop style flow controllers. Integration of new I/O points is not a problem because the RIOC is fully user-configurable.
   
   View data in real-time, or log it to computer files for historical analysis. Configure the data log sampling rate for long or short-term data capture to allow for process data, consumable usage, or maintenance trends. Aggregate process data can be logged and reported to the SECS/GEM Host.
   
   System and process errors are logged to a local computer file. Error logging levels are configurable to control the amount of captured information. Alarm information is sent to the SECS/GEM Host via a GEM compliant SECS interface configurable for SECS-I or HSMS. The Re-Alarm feature reminds operators of uncorrected and unacknowledged errors.
   
   For each I/O, the RIOC provides two upper and two lower limits coupled with ramp and time delays to compensate for real-world conditions and sensor limitations. In addition, the precision of monitoring values is configurable to compensate for overly sensitive monitoring hardware. Logging can be set to collect samples at very short or very long intervals. This feature can be used to monitor consumables, maintenance intervals, or cautionary warnings related to system wear.


4. Graphing: The built-in graphing feature allows the system operator to display graphics for data log files. The system operator can zoom and save any displayed graph. Choose from unit, limit or set-point display features


5. Success Stories: The RIOC is currently installed in the field reducing scrap and improving process by monitoring chemicals and exhaust on several legacy tools including OnTrak™ scrubbers, track tools and CMP polishers. It has successfully prevented hundreds of scrap wafers by detecting restricted chemical lines and drifting flow controllers.

RIOC™ System Configuration

Integration Features

I/O Capabilities

Limits, Alarms & Actions